Etch Rate Calculator
Calculate the etch rate of a cluster ion beam for a given set of conditions.
Beam Energy (kV)
Selected value:
Cluster Size
Selected value:
Choose a material:
E/n
14.0 eV
Y/n
0.151 nm3
Yield
753 nm3
Dose per nm
1.33e+11 ions/cm-2
This calculator uses the equations developed by Martin Seah at the National Physical Laboratory (NPL), with thanks.
Seah, J. Phys. Chem. C 117, 24, 12622–12632 (2013).