High-brightness focused ion beam

The IOG 30D is a high-brightness focused ion beam system for contaminant free micro-machining and analysis of small areas. It uses a duoplasmatron ion source and two-lens optical column to produce a high-brightness, low-aberration spot.

The source may run on pure argon (or other noble gases), nitrogen, or oxygen, and a mass filter is included in the column to separate beams of different mass/charge species. A gate valve in the
column allows the source to be serviced without venting of the whole column.

The system operates from 5 kV up to 30 kV, with a maximum beam current in excess of 500 nA into a beam diameter of under 10 µm. A selection of five adjustable apertures allows control of beam current across a wide range.

Key Features

  • 30 kV high-brightness duoplasmatron source.
  • 500 nA maximum current.
  • 500 nm spot size.
  • Integrated mass filter.
  • Gate valve for safe venting of the source.
  • Runs on H2, He, O2, N2, & Ar.