IOG C60-10

10 kV C60 Sputter Beam

The IOG C60-10 is a 10 kV ion beam system that was developed by Ionoptika in cooperation with Ulvac Phi Corporation as a tool for sputter cleaning and depth profiling of samples for XPS and Auger. The use of a C60 (fullerene) ion beam results in rapid etching with very low damage to the underlying sample. The IOG C60-10 represents a major advance for surface analysis.