IOG-25Ga Liquid Metal Ion Beam System



Focused Liquid Metal Ion Beam

The IOG 25GA is a high performance 25 kV gallium ion beam system, designed for use in micro-machining and imaging SIMS applications. It offers a wide current range with a fine probe down to 50 nm, with either DC or pulsed operation. A PC control interface allows easy setup and monitoring of the system.

Key Features

  • Gallium liquid metal ion source
  • Extremely small spot size of 50 nm.
  • High current option for 50 nA
  • High speed pulsing option
  • Pulse bunching option, for short intense pulses